| 摘要 |
PROBLEM TO BE SOLVED: To enhance the adhesion property of an inorg. film and org. film when a protective film for protecting a color filter layer or its flattening layer from plasma is formed at the time of forming the film of ITO(indium tin oxide) by sputtering on this color filter layer or its flattening film by coating and firing type ceramics. SOLUTION: The coating and firing type ceramic film is formed between the color filter layer or the flattening film and a transparent driving electrode at the time of obtaining the transparent substrate constituted by forming the transparent driving electrode on the flattening film after the color filter layer and the flattening film consisting of the org. material are successively formed on a glass substrate. The ceramic precursors of the coating and firing type ceramic film are partly acted on the org. material of the flattening film at the time of forming the ceramic film described above, by which the inorg.-org. composite layer is formed at the boundary part. |
