发明名称 |
Semiconductor device shielded by an array of electrically conducting pins and a method to manufacture such a device |
摘要 |
Apparatus and methods for manufacturing low-resistant substrate contacts in integrated circuits are disclosed. The contacts are low resistive conducting plugs and are located outside the areas of active components. The substrate is connected from the top portion in order to obtain a low resistance. Multiple metal plugs electrically interconnect the substrate of the integrated circuit with the top portion of the integrated circuit. |
申请公布号 |
AU2187397(A) |
申请公布日期 |
1997.10.10 |
申请号 |
AU19970021873 |
申请日期 |
1997.03.21 |
申请人 |
TELEFONAKTIEBOLAGET LM ERICSSON |
发明人 |
TOMAS JARSTAD;HANS NORSTROM |
分类号 |
H01L21/761;H01L21/3205;H01L23/52;H01L23/522;H01L23/552;H01L23/58 |
主分类号 |
H01L21/761 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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