发明名称 DISPOSITIF DE TRANSPORT D'OBJETS PLATS ET PROCEDE DE TRANSFERT DE CES OBJETS ENTRE LEDIT DISPOSITIF ET UNE MACHINE DE TRAITEMENT
摘要 A device for transporting planar objects contained in a predetermined atmosphere is disclosed, which device includes one or more assemblies with a plurality of parallel, planar, low thickness cells (31), in fluid connection with each other and opening on a side surface (33) of said assembly. Each cell (31) is capable of receiving a planar object (10) and of being closed by an independent gate (33). The invention also pertains to a method for transferring planar objects (10) from said device to processing machines, particularly vacuum machines.
申请公布号 FR2747112(A1) 申请公布日期 1997.10.10
申请号 FR19960004173 申请日期 1996.04.03
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 DOCHE CLAUDE
分类号 B65D85/57;B65G49/07;H01L21/673;H01L21/677;(IPC1-7):B65G49/07;C23C16/54;C23C14/56 主分类号 B65D85/57
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