METHOD FOR GETTERING IN SEMICONDUCTOR MATERIAL,申请号RU19950112857-传众专利搜索

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发明名称	METHOD FOR GETTERING IN SEMICONDUCTOR MATERIAL
摘要
申请公布号	RU2092931(C1)	申请公布日期	1997.10.10
申请号	RU19950112857	申请日期	1995.07.20
申请人	LEVIN MARK NIKOLAEVICH;KADMENSKIJ STANISLAV GEORGIEVICH;SUROVTSEV IGOR STEPANOVICH;ZON BORIS ABRAMOVICH;ROVINSKIJ ALEKSANDR PAVLOVICH;IVAKIN ANATOLIJ NIKOLAEVICH;BARANOV YURIJ IGOREVICH	发明人	LEVIN MARK NIKOLAEVICH;KADMENSKIJ STANISLAV GEORGIEVICH;SUROVTSEV IGOR STEPANOVICH;ZON BORIS ABRAMOVICH;ROVINSKIJ ALEKSANDR PAVLOVICH;IVAKIN ANATOLIJ NIKOLAEVICH;BARANOV YURIJ IGOREVICH
分类号	H01L21/322;(IPC1-7):H01L21/322	主分类号	H01L21/322
代理机构		代理人
主权项
地址

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