发明名称 PROBE, MANUFACTURING METHOD THEREFOR AND SCANNING PROBE MICROSCOPE
摘要 A probe for a near field scanning microscope and a method for manufacturing the probe are disclosed. A tip of the probe is sharpened and a transition portion 6 in a boundary zone between a base portion 5 and an elastic portion 4 is tapered. The elastic portion 4 has a cross-section that is smaller than that of the base portion 5. Also, a part of the elastic portion 4 may be shaped in a constricted region to increase the elasticity of the probe. The probe material is preferably an optical fiber having a core portion 2 that propagates light therethrough and a cladding portion 3 that differ in refractive index from each other. And the probe, except for an aperture at the tip, is coated by a metal film cladding 7. The advantage is a more flexible probe that permits soft or delicate surfaces to be scanned without damage to the surface or the probe tip. A further advantage is a microscope that can be used to investigate the optical characteristics as well as the surface topography of a sample.
申请公布号 CA2200992(A1) 申请公布日期 1997.10.09
申请号 CA19972200992 申请日期 1997.03.25
申请人 SEIKO INSTRUMENTS INC. 发明人 YAMAMOTO, NORITAKA;MURAMATSU, HIROSHI;NAKAJIMA, KUNIO;CHIBA, NORIO
分类号 G01B11/30;G01N37/00;G01Q20/04;G01Q60/18;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/16;(IPC1-7):G01B5/20;G01L1/00;G01N21/17;G01B11/24 主分类号 G01B11/30
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