发明名称 |
PROBE, MANUFACTURING METHOD THEREFOR AND SCANNING PROBE MICROSCOPE |
摘要 |
A probe for a near field scanning microscope and a method for manufacturing the probe are disclosed. A tip of the probe is sharpened and a transition portion 6 in a boundary zone between a base portion 5 and an elastic portion 4 is tapered. The elastic portion 4 has a cross-section that is smaller than that of the base portion 5. Also, a part of the elastic portion 4 may be shaped in a constricted region to increase the elasticity of the probe. The probe material is preferably an optical fiber having a core portion 2 that propagates light therethrough and a cladding portion 3 that differ in refractive index from each other. And the probe, except for an aperture at the tip, is coated by a metal film cladding 7. The advantage is a more flexible probe that permits soft or delicate surfaces to be scanned without damage to the surface or the probe tip. A further advantage is a microscope that can be used to investigate the optical characteristics as well as the surface topography of a sample.
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申请公布号 |
CA2200992(A1) |
申请公布日期 |
1997.10.09 |
申请号 |
CA19972200992 |
申请日期 |
1997.03.25 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
YAMAMOTO, NORITAKA;MURAMATSU, HIROSHI;NAKAJIMA, KUNIO;CHIBA, NORIO |
分类号 |
G01B11/30;G01N37/00;G01Q20/04;G01Q60/18;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/16;(IPC1-7):G01B5/20;G01L1/00;G01N21/17;G01B11/24 |
主分类号 |
G01B11/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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