发明名称 INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM
摘要 <p>An instrument which is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure and contains a resin basic material and at least one additive selected from among a group composed of a lubricant, plasticizer, an antioxidant and an antistatic agent. The additive does not generate any gaseous organic component under the conditions of a room temperature and the atmospheric pressure.</p>
申请公布号 WO1997037381(P1) 申请公布日期 1997.10.09
申请号 JP1997001039 申请日期 1997.03.27
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