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经营范围
发明名称
Exposure apparatus
摘要
申请公布号
EP0723173(A3)
申请公布日期
1997.10.08
申请号
EP19960100719
申请日期
1996.01.18
申请人
NIKON CORPORATION
发明人
KUMAZAWA, MASATO
分类号
G02B13/22;G02B17/08;G02B27/18;G03F7/20;H01L21/027;(IPC1-7):G02B13/22
主分类号
G02B13/22
代理机构
代理人
主权项
地址
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