发明名称 |
PATANKEISEIZAIRYOTOSOREOMOCHIITAPATANKEISEIHOHO |
摘要 |
A pattern can be formed on a substrated using a pattern forming material comprising (a) a medium, e.g. a polymer or compound, having reactivity for changing solubility in an alkali aqueous solution by a reaction using an acid as a catalyst, and (b) as an acid precursor an alkylsulfonic acid ester obtained from a compound having at least two phenolic hydroxyl groups. |
申请公布号 |
JP2661671(B2) |
申请公布日期 |
1997.10.08 |
申请号 |
JP19890066281 |
申请日期 |
1989.03.20 |
申请人 |
HITACHI SEISAKUSHO KK;HITACHI KASEI KOGYO KK |
发明人 |
UENO TAKUMI;SHIRAISHI HIROSHI;HAYASHI NOBUAKI;AOKI EMIKO;TADANO KEIKO |
分类号 |
G03F7/038;C07C309/65;G03F7/004;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):G03F7/004 |
主分类号 |
G03F7/038 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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