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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2661355(B2)
申请公布日期
1997.10.08
申请号
JP19900266789
申请日期
1990.10.04
申请人
NIPPON DENKI KK
发明人
OONO YASUYUKI
分类号
H01L21/3213;H01L21/3205;H01L23/52;(IPC1-7):H01L21/320;H01L21/321
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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