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发明名称
CMOSKOZOOKEISEISURUHOHO
摘要
申请公布号
JP2662230(B2)
申请公布日期
1997.10.08
申请号
JP19870501145
申请日期
1987.01.20
申请人
SANSEI DENSHI KK
发明人
SURUTSUKU NIKORASU JON;MIRAA GEIRU UIRUBAAN
分类号
H01L21/82;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L21/823
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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