Piezoelectric element with chamber structure, method of producing the same and device using this element

摘要

The piezoceramic component has a chamber structure with parallel chambers arranged in groups, all the chambers in the same group having a common base and each 2 adjacent chambers having a common chamber wall. The inside surfaces of the chamber base and the chamber walls are fully or partially clad with operating electrodes and are made of a piezoelectrically-polarised material, for acting as auxiliary electrodes. Pref. the chambers are formed in a pre-polarised piezoceramic plate with piezoceramic and auxiliary electrode layers.