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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2660024(B2)
申请公布日期
1997.10.08
申请号
JP19880286978
申请日期
1988.11.14
申请人
TOSHIBA KONHOONENTSU KK
发明人
YANAGISAWA SATOSHI
分类号
H01L29/84;G01L9/00;G01L9/04;(IPC1-7):H01L29/84
主分类号
H01L29/84
代理机构
代理人
主权项
地址
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