| 摘要 |
PURPOSE:To easily obtain a substrate having the same land part signal intensity and group part signal intensity by reverse sputtering the substrate surface or the film forming surface prior to the formation of a recording film. CONSTITUTION:The land part signal intensity is decreased and the group part signal intensity is increased by reverse sputtering the substrate surface or the film forming surface prior to the formation of the recording film, for example, a silicon nitride film surface to be used as a protective film prior to the formation of the recording film. The land part signal intensity and the group part signal intensity are, therefore, made into the same intensity if the land part signal intensity is larger than the group part signal intensity in an initial state. The substrate having the same land part signal intensity and the group part signal intensity is obtd. in this way. |
