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发明名称
PATAANKEISEIHOHO
摘要
申请公布号
JP2661237(B2)
申请公布日期
1997.10.08
申请号
JP19890028894
申请日期
1989.02.08
申请人
MITSUBISHI DENKI KK
发明人
KAMON KAZUYA
分类号
H01L21/306;H01L21/027;H01L21/30;H01L21/338;H01L29/812;(IPC1-7):H01L21/027
主分类号
H01L21/306
代理机构
代理人
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地址
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