发明名称 Pressure sensor package and method of making the same
摘要 A method of securing a pressure sensor diaphragm to a pressure sensor base, including the steps of positioning the pressure sensor diaphragm over the pressure sensor base, placing a pressure sensor cap over the pressure sensor diaphragm, applying a tensile force to at least a portion of the cap, and deforming a portion of the cap around a portion of the base. The applying step can occur before the deforming step by engaging a portion of the cap and advancing the base toward the cap to create tension in a portion of the cap. This creates a tensile preload in the cap. The applying step can instead be performed during the deforming step by engaging a first portion of the cap and advancing a second portion of the cap toward the first portion of the cap and around a portion of the base. This can create tension in a portion of the cap when the deformation operation is being performed. <IMAGE>
申请公布号 EP0800070(A1) 申请公布日期 1997.10.08
申请号 EP19970400768 申请日期 1997.04.03
申请人 SSI TECHNOLOGIES, INC. 发明人 SOKN, ERICK LEE
分类号 G01L9/04;G01L7/08;G01L9/00;H01L29/84 主分类号 G01L9/04
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