发明名称 |
A METHOD AND APPARATUS FOR VARYING THE FLUX OF A MOLECULAR BEAM PRODUCED BY A MOLECULAR BEAM EPITAXY CELL |
摘要 |
Apparati and methods for varying the flux of a molecular beam emanating from an effusion cell are disclosed. The apparatus includes a means for controllably adjusting the angular distribution of a molecular field effusing from a source material within the effusion cell, therein adjusting the flux of the beam. The method herein disclosed, with respect to the related apparati, including the step of selectively altering the angular distribution of an effusing molecular field, produced by a heated source material, which comprises the molecular beam, thereby varying the flux of the beam. |
申请公布号 |
EP0799330(A1) |
申请公布日期 |
1997.10.08 |
申请号 |
EP19950942600 |
申请日期 |
1995.12.11 |
申请人 |
NORTHROP GRUMMAN CORPORATION |
发明人 |
LEE, MYUNG, B.;VANHATALO, JARI |
分类号 |
C30B23/06;(IPC1-7):C30B25/00 |
主分类号 |
C30B23/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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