| 摘要 |
PURPOSE:To perform a via processing in high dimensional accuracy and high yield, in a short time, by radiating light or electron ray to a ceramic green sheet containing a specific organic binder component to effect the modification of the irradiated part and dissolving and removing the via part. CONSTITUTION:A ceramic green sheet is produced by mixing inorganic component powder of ceramic with an organic binder component composed mainly of an organic material having a solubility in a solvent varying with irradiation of light or electron ray and forming the obtained mixture in the form of a sheet. The green sheet is irradiated with light or electron ray through a mask pattern based on a via design to modify the part irradiated with light or electron ray. The part of the green sheet corresponding to the via part is dissolved and removed with a solvent to form a via hole. |
