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发明名称
TEEPUKYARYANOKOZO
摘要
申请公布号
JP2661280(B2)
申请公布日期
1997.10.08
申请号
JP19890233543
申请日期
1989.09.08
申请人
FUJITSU KK
发明人
HAMANO TOSHIO
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
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地址
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