| 摘要 |
In accordance with the present invention, methods and systems are provided which afford solutions to the problems of gas distribution of ultra-high purity ESGs at high gas flow rates. A first aspect of the invention is a system comprising a compressed liquefied gas container; an internal heat exchanger within the compressed liquefied gas container; a gas supply conduit which takes feed from the container and delivers the ESG to a process; and an external heat exchanger positioned effectively near the conduit downstream of the container but upstream of the process. |
