发明名称 Scanning reflection electron diffraction microscope
摘要 A scanning reflection electron diffraction microscope causes a primary electron beam from its electron gun to be reflectively diffracted from a sample and a diffraction pattern to be formed on a fluorescent screen. An optical lens reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface, thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil and a condenser coil, the image-carrying electron beam is detected by an electron-multiplier such that a diffraction pattern is displayed on a cathode ray tube.
申请公布号 US5675148(A) 申请公布日期 1997.10.07
申请号 US19920827422 申请日期 1992.01.29
申请人 SHIMADZU CORPORATION 发明人 MARUI, TAKAO
分类号 H01J37/28;G01Q30/02;G01Q30/04;H01J31/48;H01J37/22;H01J37/29;H01J37/295;(IPC1-7):H01J37/26 主分类号 H01J37/28
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