| 摘要 |
PROBLEM TO BE SOLVED: To produce an AlN sintered compact excellent in chemical resistance to acids and alkalis while maintaining high heat conductivity at a low production cost. SOLUTION: A powdery mixture is prepd. by adding a rare earth element (RE) and an alkaline earth metal (R) as principal sintering aids to AlN by 0.5-20.0wt.% (expressed in terms of oxides) in total, adding SiO2 and MgO by 0.1-3.0wt.% in total and further adding Al2 O3 so that the molar ratio of Al2 O3 to RE2 O3 is regulated to 1.7-20.0. The mixture is compacted and fired at <=1,700 deg.C. By this firing, YAG type crystals are deposited as the principal crystal phase of the grain boundaries of the resultant AlN sintered compact. |
