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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT AND METHOD FOR TESTING IT
摘要
申请公布号
JPH09264928(A)
申请公布日期
1997.10.07
申请号
JP19960074848
申请日期
1996.03.28
申请人
NEC CORP
发明人
OGAWA TADAHIKO
分类号
G01R31/28;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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