| 发明名称 |
Anode bonding method for selected regions |
| 摘要 |
An anode bonding method for bonding a first substrate and a second substrate, both of which have a recessed portion, includes the steps of heating the first and second substrates in a stacked state; and bonding the substrates by applying a voltage between the substrates. |
| 申请公布号 |
US5673476(A) |
申请公布日期 |
1997.10.07 |
| 申请号 |
US19950563906 |
申请日期 |
1995.11.22 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
AKAIKE, MASATAKE;YAGI, TAKAYUKI;FUSHIMI, MASAHIRO |
| 分类号 |
G01P15/08;G01P15/093;G01P15/12;G01P15/18;H01L21/02;H01L21/20;H01L29/84;(IPC1-7):H01R43/00 |
主分类号 |
G01P15/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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