| 摘要 |
PROBLEM TO BE SOLVED: To suppress a step low on the surface where a conductive coil is formed, to obtain good magnetic characteristics, to make high temp treatment unnecessary, to avoid deterioration in the magnetic characteristics and to improve the work efficiency in the production process by applying a specified photosensitive resin material and forming a flattening layer at rather low temp. SOLUTION: After a reproducing part 1, upper shield core 2, recording gap g, flattening layer 3 and conductive coil 4 are formed in specified processes on a base substrate B, a photosensitive resin material is applied to form a flattening layer 5 to insulate from an upper core part and to flatten the surface where the core is formed. In this method, an alkali-soluble resin comprising alkali-soluble radical polynm. monomers having phenol type hydroxyl groups or carboxyl groups, or a 1,2-quinone diazide compd. is used for the photosensitive resin material. Thereby, the resin material can be hardened at <=200 deg.C, the step after hardening by heating is made about 0.1μm, and a thin film magnetic head having excellent magnetic characteristics can be obtd. without causing deterioration by heating.
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