| 摘要 |
PROBLEM TO BE SOLVED: To evaluate the quality of a titanaium nitride film by irradiating the titanium nitride film formed on an article with high brightness light and measuring the chromaticity of reflected light. SOLUTION: The film coating surface of a titanium nitride film coated article S, supported on a holder 2 is irradiated with light of which the luminous intensity is several 1000-several 10000 lux or slightly larger than this intensity from the diffusion lens 12 of a high brightness light source and the chromaticity of reflected light is measured by a chromaticity meter 3 to measure the chromaticity of the titanium nitride film. Then, the titanium nitride film of the article S is evaluated on the basis of the preliminarily known correlation between the quality (hardness, crystal state, compsn. or specific resistance) of the titanium nitride film measured by a known method and the measured quality. Since the film quality can be evaluated by directly measuring the chromaticity of the film of the article S in a non-destructive manner, an actual article can be subjected to the evaluation of film quality. |
