Diffraction gratings in optical waveguide components and production method thereof

摘要

A diffraction grating structure for coupling light into or out of a high refractive index waveguide layer on a carrier substrate is formed by irradiating the carrier substrate and/or the layer with UV laser light that is subject to simultaneous, spatially periodic intensity modulation. The modulation may be achieved, for example, by a biprism. The modulated UV light has the effect of periodically modulating the local refractive index of the waveguide layer or of the surface of the substrate to form the diffraction grating.