Scanning probe microscope having an optical system for enabling identification of the scanning region and sample observation during a scanning operation

摘要

A scanning probe microscope includes a probe having a minute aperture formed in a distal end thereof. The probe allows light to propagate therethrough and is located close to a sample. A moving device is provided for relatively moving the probe across a surface of the sample, and an observation optical system is provided for optically observing the sample. A light source emits a light beam for generating evanescent waves, and a beam irradiation device is provided for irradiating the light beam on the sample so that the light beam is totally reflected by an optical interface of the sample. The beam irradiation means and the observation optical system share an objective located on a side of the sample opposite to the probe. A light detecting device is provided for detecting an intensity of the light introduced into the probe through the aperture formed in the distal end of the probe.