JIG FOR SUSCEPTOR OF CVD APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent a substrate from being contaminated with a substance deposited on a susceptor by laying the substrate to be treated on a susceptor which has a hole to house the structure to be treated and is made of a less contaminable material little in contamination and superior in washing property. SOLUTION: A quartz-made annular ring-like jig 12 is disposed on a susceptor 11 good in thermal conductivity and substrate wafer 13 is disposed within this ring. The susceptor is made of Mo and the ring 12 is made of quartz glass superior in washing property to wash and dry every deposition process. The substrate 13 uses a GaAs wafer. The ring 12 has a hole fitted to the shape of the substrate 13 so that the gap round the substrate 13 fitted in the hole is 1mm or less. To avoid disturbing the flow of a material gas at deposition, the ring has the same thickness as that of the substrate 13.