| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate delivering device capable of delivering a substrate certainly from one side holder to other side holder without damaging the substrate. SOLUTION: A substrate holder 5 holds the substrate 8 attracting each mask 9, 10 of the substrate 8 with a permanent magnet. A substrate holder 12 jets compressed air through gap S between the substrate 8 and a nozzle 15 from the nozzle 15 simultaneously with attracting each mask 9, 10 of the substrates 8 with electromagnets 13, 14. This jetted air flows in high speed through the gap S and therein the atmospheric pressure is lowered and the substrate 8 is sucked toward the substrates holder 12. The masks 9, 10 of the substrate 8 are attracted closely to the electromagnets 13, 14 by the suction due to the high speed jet flow and the attraction with the electromagnets 13, 14. Thereby, masks 9, 10 are firmly attracted by the electromagnets 13, 14.</p> |
