发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 <p>PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device in which the intrusion of moisture, movable ions, etc., into the interior from the circumference of a semiconductor chip can be prevented, and to provide; the manufacturing method of the semiconductor device. SOLUTION: Interlayer insulating films 31 and 35 are separated into the circumferential side and the internal side of a chip region 24 by metal films 34b and 37, and besides, the metal films 34b and 37 are electrically connected to a P-type silicon substrate 11 through a P-type polycrystalline silicon film 26 and a P-type impurity diffusion layer 28. As a result, the moisture and the movable ions etc., which are introduced into the interlayer insulating films 31 and 35 from the circumference of a semiconductor chip, are electrically caught by the metal films 34b and 37 and they are not infiltrated into the inside of the semiconductor chip.</p>
申请公布号 JPH09266209(A) 申请公布日期 1997.10.07
申请号 JP19970025806 申请日期 1997.01.24
申请人 NIPPON STEEL CORP 发明人 TANI TOMOFUNE
分类号 H01L23/52;H01L21/301;H01L21/3205;H01L21/822;H01L27/04;(IPC1-7):H01L21/320 主分类号 H01L23/52
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