| 摘要 |
PROBLEM TO BE SOLVED: To automatically inform the operator of a condition in which a gas laser oscillator causes process failure by previously setting the open/close duty value of a gas exhaustion valve and operating a display means when the actual open/close duty value of the gas exhaustion value becomes the set value or higher. SOLUTION: The clogging of a leak valve 17 due to dust, oil mist, etc., mixed with laser gas gradually occurs with the operation of a gas laser oscillator, a leak gas quantity gradually reduces and the slight increase of laser gas pressure in the equipment gradually progresses. The actual open/close duty value of the gas exhaust value 16 calculated by a calculator 21 is compared with a set open/close duty value decided by an open/close data setting equipment 2 by a comparing equipment 23, and when the actual open/close duty value becomes the set open/close duty value or higher, a display means 24 operates to automatically inform the operator of a condition in which the gas laser oscillator causes process failure. |
