EXHAUST STRUCTURE OF POLISHING DEVICE,申请号JP19960103532-传众专利搜索

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发明名称	EXHAUST STRUCTURE OF POLISHING DEVICE
摘要
申请公布号	JPH09262767(A)	申请公布日期	1997.10.07
申请号	JP19960103532	申请日期	1996.03.28
申请人	EBARA CORP	发明人	TOGAWA TETSUJI;KATSUOKA SEIJI
分类号	B24B55/12;(IPC1-7):B24B55/12	主分类号	B24B55/12
代理机构		代理人
主权项
地址

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