Method of fabricating probe unit

摘要

A probe unit comprising a base in the form of a rectangular plate and a plurality of ultrathin metal wires which are partially secured to the base at a given pitch. Each of the wires comprises a straight portion firmly secured to the base, a bent portion located on an extension of the straight portion, and an inclined portion inclined from the bent portion outwardly of the base toward an inspected surface of an object to be inspected, and an R-shaped portion extending from the front end of the inclined portion outwardly of the base. The bent portion protrudes outwardly from the base and is bent toward the inspected surface. The R-shaped portion forms each probe pin bearing against the inspected surface.