| 摘要 |
<p>The source of fast neutral molecules comprises: a gas-discharge chamber (1) with anode (5), cathode (7) and discharge power source (8); a charge-exchange chamber (2) with additional electrodes (16); an accelerator grid (3) consisting of grid elements (18) that are electrically insulated from one another; and an acceleration voltage source (4). The width of the accelerator grid (3) exceeds the charge-exchange path length of ions in the working range of gas pressures, where L = 1/nσ, n being the gas molecule density in the charge-exchange chamber and σ the cross section of the charge-exchange. The negative pole of the accelerator voltage source (4) is connected via a resistor (11) to the charge-exchange chamber (2), via resistors (17) to the additional electrodes and via resistors (19) to the grid elements (18). This arrangement simplifies regulation of the device and makes it more reliable. When electrical spark-over occurs, cathode arc spots are formed only on the accelerator grid (3), preventing damage to articles undergoing treatment and improving their quality.</p> |
