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发明名称
Halbleiterbauelement-Testgerät
摘要
申请公布号
DE19680786(T1)
申请公布日期
1997.10.02
申请号
DE19961080786T
申请日期
1996.07.24
申请人
ADVANTEST CORP., TOKIO/TOKYO, JP
发明人
KOBAYASHI, YOSHIHITO, SAITAMA, JP;YAMASHITA, TSUYOSHI, GUNMA, JP;NAKAMURA, HIROTO, SAITAMA, JP;NEMOTO, SHIN, YONO, SAITAMA, JP;MASUO, YOSHIYUKI, GYODA, SAITAMA, JP;ITO, AKIHIKO, HANYU, SAITAMA, JP
分类号
G01R31/26;G01R31/28;H01L21/677;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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