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发明名称
Halbleiteranordnung mit einem Passivierungssystem aus halbisolierenden Silizium- und Isolatorschichten
摘要
申请公布号
DD264548(B5)
申请公布日期
1997.10.02
申请号
DD19870307453
申请日期
1987.10.01
申请人
SMI SYSTEM MICROELECTRONIC INNOVATION GMBH.
发明人
RAU STEPHAN DIPL ING;BIERMANN ROSWITHA DIPL CHEM;GRIESSBACH INA;LANG GERD DIPL ING;ROST WOLFGANG DIPL ING;SUTTER PETER DIPL ING
分类号
H01L21/28;H01L21/56;H01L29/06;(IPC1-7):H01L21/56;H01L29/31
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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