Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls,申请号DE19956000594-传众专利搜索

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发明名称	Ionenimplanter und Verfahren zur Implantierung eines Ionenstrahls
摘要
申请公布号	DE69500594(D1)	申请公布日期	1997.10.02
申请号	DE19956000594	申请日期	1995.03.02
申请人	ADVANCED MICRO DEVICES, INC., SUNNYVALE, CALIF., US	发明人	DOLMAN, DENVER L., AUSTIN, TX 78703, US;LE, VAN, AUSTIN, TX 78729, US;FRIEDE, DONALD L., AUSTIN, TX 78739, US
分类号	G21K5/04;C23C14/48;H01J37/147;H01J37/317;H01L21/265;(IPC1-7):H01J37/147	主分类号	G21K5/04
代理机构		代理人
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