发明名称 A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE BY THE USE OF AN IMPLANTING STEP AND A DEVICE PRODUCED THEREBY
摘要 <p>A method for producing a semiconductor device comprising a step a) of implanting an impurity dopant of a first conductivity type into said semiconductor layer (1) being doped according to a second opposite conductivity type for forming a first type doped surface layer (2) surrounded, except for the top surface thereof, by second conductivity type doped regions (3) of said semiconductor layer for forming a pn-junction (4) at the interface thereto. A highly doped additional semiconductor layer (5) is grown on top of said surface layer (2) for forming a contact layer allowing a low resistance ohmic contact to be established to the device so created.</p>
申请公布号 WO1997036319(A1) 申请公布日期 1997.10.02
申请号 SE1997000534 申请日期 1997.03.26
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