Controlling charged-beam exposure,申请号GB19970006458-传众专利搜索

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发明名称	Controlling charged-beam exposure
摘要
申请公布号	GB2311650(A)	申请公布日期	1997.10.01
申请号	GB19970006458	申请日期	1997.03.27
申请人	* NEC CORPORATION	发明人	NAOAKI * AIZAKI
分类号	G03F7/20;H01J37/304;H01L21/027;(IPC1-7):H01J37/304	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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