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发明名称
Method and device for conformity testing of hybridization balls
摘要
申请公布号
EP0627611(B1)
申请公布日期
1997.10.01
申请号
EP19940401186
申请日期
1994.05.30
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE
发明人
CAILLAT, PATRICE;PARAT, GUY;NICOLAS, GERARD
分类号
H01L21/60;G01B11/14;H01L21/66;H05K13/08;(IPC1-7):G01B11/14
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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