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发明名称
METHOD FOR DEPOSITION OF DIAMONDLIKE CARBON FILMS
摘要
申请公布号
EP0797688(A1)
申请公布日期
1997.10.01
申请号
EP19960934131
申请日期
1996.10.09
申请人
HE HOLDINGS, INC. DBA HUGHES ELECTRONICS
发明人
WEI, RONGHUA R.;MATOSSIAN, JESSE N.
分类号
H05H1/46;C01B31/02;C23C16/26;C23C16/27;C23C16/50;C23C16/503;C30B29/04;H01J37/32;(IPC1-7):C23C16/26
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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