Optical element with fiducial mark and fabrication process therefor

摘要

The optical element, e.g. a laser, has a waveguide (WL) and an alignment marking allowing accurate optical adjustment of the optical element relative to a carrier. The alignment marking is etched in a waveguide layer packet (WS) in the same etching step as the waveguide. The alignment marking is masked by a dielectric layer (DI) to prevent it being covered by the cover layer (DS) for the waveguide, or alternatively the cover layer is etched from the surface of the alignment marking via a selective etching process.