METHOD OF POLISHING MAGNETIC DISC BASE

摘要

PROBLEM TO BE SOLVED: To prevent a substrate from being adhered to an upper surface plate after the polishing of the substrate is terminated so that it is not damaged by falling by separating the upper surface plate from a lower surface plate while supplying water to the base when the upper surface plate is separated from the lower surface plate after polishing is terminated to take out the base. SOLUTION: When an upper surface plate 2 is separated from a lower surface plate 5 to take out a magnetic disc substrate 26 after the polishing of the substrate 26 is terminated, the upper surface plate 2 is separated from the lower surface plate 5 while supplying water to the substrate 26. This water may be a wash water 32 supplied from a wash water supply pipe 23 to a wash water basin 24 common to a polishing fluid basin 15 through a wash water supply valve 22 after a polishing fluid 31 is used. Thus, the upper surface plate 2 is raised without the substrate 26 being adhered to the upper surface plate 2, and the damage of the substrate 26 by falling can be prevented.