Method and apparatus for plasma processing,申请号IL19960120914-传众专利搜索

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发明名称	Method and apparatus for plasma processing
摘要
申请公布号	IL120914(D0)	申请公布日期	1997.09.30
申请号	IL19960120914	申请日期	1996.10.10
申请人	HE HOLDINGS, INC DBA HUGHES ELECTRONICS	发明人
分类号	H05H;(IPC1-7):H05H	主分类号	H05H
代理机构		代理人
主权项
地址

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