| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the screw loosening of a bearing pre-pressure mechanism and the loss of the pre-pressure by the change of a simple constitution by the increase of a load in response to the high speed of a stage movement, in a stage drive device, for example, in which a stage is moved by the rotation of a feed screw shaft like the drive device of X stage and Y stage in a liquid crystal exposure device. SOLUTION: A slanted part 16d having the notches 16c more than one place in an axial direction is installed on a pre-pressure member 16 screw-engaged with a screw 5d formed on a stage feed screw shaft 5 and for giving the pre- pressure to the bearing 11 of the stage feed screw shaft 5 and a tightening member 17 is screw-engaged with the slanted part 16d and the slanted part 16d of the pre-pressure member 16 is tightened to the feed screw shaft 5.</p> |
