| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for supplying a granular raw material capable of supplying the granular raw material to a feed tank while performing a single crystal pulling up in a continuous charging method or a recharging in a multi- pooling method, without stopping these processes, and a device therefor. SOLUTION: This method for supplying a granular raw material is to equip a feed tank 11 for one time or continuously feeding a fixed amount of granular raw material to a pulling up device 1, a chamber 13 joined to the feed tank through a gate valve 12, a granular raw material supplying part 15 for supplying the granular raw material to the chamber 13 through a gate valve 14 and a pressure adjusting means 20 for adjusting the pressure in the chamber 13, and supply the granular raw material into the feed tank 11, while keeping the inner pressure of the feed tank 11 at a same pressure as the inner pressure of the single crystal pulling up device 1. |
