发明名称 Washing apparatus, and washing method
摘要 Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
申请公布号 US5671764(A) 申请公布日期 1997.09.30
申请号 US19950560708 申请日期 1995.11.20
申请人 TOKYO ELECTRON LIMITED;TOKYO ELECTRON SAGA LIMITED 发明人 MURAKAMI, SHINYA;KAMIKAWA, YUUJI;IZUMI, SINICHIRO;ANAI, NORIYUKI;SATOH, TAKAMI;SHIRAISHI, HIROFUMI;HARADA, KOJI;TOMOEDA, TAKAYUKI;TANAKA, HIROSHI
分类号 B08B3/02;B08B3/04;B08B3/10;H01L21/00;H01L21/677;(IPC1-7):B08B15/00 主分类号 B08B3/02
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