发明名称 |
Washing apparatus, and washing method |
摘要 |
Disclosed herein is a washing apparatus comprising a washing chamber, an opening/closing mechanism, and a nozzle. The chamber has an opening and is designed for washing the objects transported from outside through the opening. The opening/closing mechanism is designed to open and close the opening of the washing chamber. The nozzle is used to wash the opening/closing mechanism. The apparatus further comprises a washing vessel filled with a washing liquid, for washing the objects, and also a nozzle for applying a washing liquid to the objects located in the washing vessel when the objects are partly exposed as the washing liquid is discharged from the washing vessel.
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申请公布号 |
US5671764(A) |
申请公布日期 |
1997.09.30 |
申请号 |
US19950560708 |
申请日期 |
1995.11.20 |
申请人 |
TOKYO ELECTRON LIMITED;TOKYO ELECTRON SAGA LIMITED |
发明人 |
MURAKAMI, SHINYA;KAMIKAWA, YUUJI;IZUMI, SINICHIRO;ANAI, NORIYUKI;SATOH, TAKAMI;SHIRAISHI, HIROFUMI;HARADA, KOJI;TOMOEDA, TAKAYUKI;TANAKA, HIROSHI |
分类号 |
B08B3/02;B08B3/04;B08B3/10;H01L21/00;H01L21/677;(IPC1-7):B08B15/00 |
主分类号 |
B08B3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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