发明名称 PURAZUMANOFUKINITSUSEIOHOSEISURUPURAZUMASOCHI
摘要 <p>A device for reducing plasma irregularities includes an electrode assembly capable of applying an electric potential to said plasma. The electrode assembly includes a portion for reducing the plasma irregularities. The portion which reduces the plasma irregularities includes alternately a buried portion which is capable of altering the potential within the buried element, or else a conditioned portion of the surface which controls reflectivity and/or emissivity of portions of a surface of the electrode assembly differently. <IMAGE></p>
申请公布号 JP2659919(B2) 申请公布日期 1997.09.30
申请号 JP19940296306 申请日期 1994.11.30
申请人 INTAANASHONARU BIJINESU MASHIINZU CORP 发明人 GEIRII ESU SERUIN;MANOJU DARUII;SHII RICHAADO GYARUNIERI;JEIMUSU JEI MATSUKUGIRU;GEIRII DABURYU RABORUFU;MAHESUWARAN SURENDORA
分类号 H05H1/46;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H01L21/683;(IPC1-7):H01L21/306;H01L21/68 主分类号 H05H1/46
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