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发明名称
UEHAISOSOCHI
摘要
申请公布号
JP2659321(B2)
申请公布日期
1997.09.30
申请号
JP19930092975
申请日期
1993.04.20
申请人
KAWASAKI SEITETSU KK
发明人
TSUBOTA KAZUYA
分类号
B65G49/07;B65G51/00;B65G51/01;B65G51/04;H01L21/677;H01L21/68;(IPC1-7):B65G49/07
主分类号
B65G49/07
代理机构
代理人
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