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发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH09253560(A)
申请公布日期
1997.09.30
申请号
JP19960070639
申请日期
1996.03.26
申请人
MITSUI TOATSU CHEM INC
发明人
SADAMOTO MITSURU;FUKUDA SHIN
分类号
B05C11/06;(IPC1-7):B05C11/06
主分类号
B05C11/06
代理机构
代理人
主权项
地址
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